On the transformation of "zincone"-like into porous ZnO thin films from sub-saturated plasma enhanced atomic layer deposition. [PDF]
Perrotta A +4 more
europepmc +1 more source
Edge-Site Nanoengineering of WS2 by Low-Temperature Plasma-Enhanced Atomic Layer Deposition for Electrocatalytic Hydrogen Evolution. [PDF]
Balasubramanyam S +8 more
europepmc +1 more source
Aluminum Nitride Transition Layer for Power Electronics Applications Grown by Plasma-Enhanced Atomic Layer Deposition. [PDF]
Seppänen H +5 more
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Comparison of chemical stability and corrosion resistance of group IV metal oxide films formed by thermal and plasma-enhanced atomic layer deposition. [PDF]
Li M +7 more
europepmc +1 more source
Measurements of Microstructural, Chemical, Optical, and Electrical Properties of Silicon-Oxygen-Nitrogen Films Prepared by Plasma-Enhanced Atomic Layer Deposition. [PDF]
Ma HP +8 more
europepmc +1 more source
Direct Growth of Al2O3 on Black Phosphorus by Plasma-Enhanced Atomic Layer Deposition. [PDF]
Wu BB +9 more
europepmc +1 more source
Systematic Study of the SiOx Film with Different Stoichiometry by Plasma-Enhanced Atomic Layer Deposition and Its Application in SiOx/SiO₂ Super-Lattice. [PDF]
Ma HP +8 more
europepmc +1 more source
TiOxNy Modified TiO2 Powders Prepared by Plasma Enhanced Atomic Layer Deposition for Highly Visible Light Photocatalysis. [PDF]
Cao YQ +8 more
europepmc +1 more source
Large-scale synthesis of uniform hexagonal boron nitride films by plasma-enhanced atomic layer deposition. [PDF]
Park H +5 more
europepmc +1 more source
Photocatalytic Properties of Co3O4-Coated TiO2 Powders Prepared by Plasma-Enhanced Atomic Layer Deposition. [PDF]
Zhao XR +6 more
europepmc +1 more source

